CHA 635 Modular Deposition Systems provide the utmost in versatility and scalability for both sputtering and evaporation applications. The systems allow you to add capability and capacity as you need it with numerous options, such as a class 10 mini-environment and AGV compliant cassette-to-cassette robotic wafer handling. Each system includes touch screen PLC control and an intuitive Wonderware GUI.
CHA 635 Modular Deposition Systems provide the utmost in versatility and scalability for both sputtering and evaporation applications. The systems allow you to add capability and capacity as you need it with numerous options, such as a class 10 mini-environment and AGV compliant cassette-to-cassette robotic wafer handling. Each system includes touch screen PLC control and an intuitive Wonderware GUI.