The largest of the SE/SEC-Series, the SE-1000 has a 10-inch diffusion pump rated at 5300 l/s, and is typically equipped with a 25.5-inch diameter, water-cooled bell jar, a 26-inch diameter stainless steel baseplate, and Planetary Fixturing holding up to 36 4-inch wafers. One Button Automation and Lift-Off Fixturing are among the most popular options added to the system.
The largest of the SE/SEC-Series, the SE-1000 has a 10-inch diffusion pump rated at 5300 l/s, and is typically equipped with a 25.5-inch diameter, water-cooled bell jar, a 26-inch diameter stainless steel baseplate, and Planetary Fixturing holding up to 36 4-inch wafers. One Button Automation and Lift-Off Fixturing are among the most popular options added to the system.