The SE-600's 6-inch, high-speed diffusion pump delivers a pumping speed of 2400 l/s. Like all SE/SEC-Series systems, the baseplate (typically 20 inches) accommodates up to 15 feedthroughs for instrumentation, control and rotary motion. SE-600 systems are most often equipped with a 19.5-inch diameter bell jar and Planetary Fixturing having a capacity of 18 4-inch wafers. The average pumpdown time of less than 30 minutes allows throughput in excess of 54 wafers per hour.
The SE-600's 6-inch, high-speed diffusion pump delivers a pumping speed of 2400 l/s. Like all SE/SEC-Series systems, the baseplate (typically 20 inches) accommodates up to 15 feedthroughs for instrumentation, control and rotary motion. SE-600 systems are most often equipped with a 19.5-inch diameter bell jar and Planetary Fixturing having a capacity of 18 4-inch wafers. The average pumpdown time of less than 30 minutes allows throughput in excess of 54 wafers per hour.