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 The Dr Series dump rinser is the most efficient process rinsing module. State-of-the-art engineering has eliminated particle entrapment, minimized rinsing time, reduced D.I. water consumption, and shortened dump time.
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F Series - Constant Temperature Filter Etch |
 The MODUBATH® F Series will significantly reduce acid consumption while providing continuous 1.0 to 0.2 micron filtration for reduced particle count & improved yields. The F Series maintains ±1°C control; 0.4°C under certain conditions. The F Series offers many available options to match your process needs. |
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MSI Series - Indirect Megasonic System |
 The MSI Series of Indirect Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk and flat panel cleaning, etch and strip applications. In head-to-head tests with other Megasonic brands, Modutek's MSI Series comes out on top. Modutek's MSI Series has the ability to remove tough 0.1µm particles and operate at temperatures up to 160°C. |
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MSD Series - Direct Megasonic System |
 The Modutek MSD Series of Direct Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk, and flat panel cleaning, etch and strip applications. With the industry's only Teflon-coated transducer plate and Modutek's MSD Series goes where no one else can! MSD Series has the ability to remove particles down to 0.1µm. |
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MSG Series - Megasonic Generator |
 The Modutek MSG Series of Megasonic Generators is the essential ingredient which adds that final bit of flavor to every Modutek MSI and MSD Series megasonic process modules. With digital control, true PLL tuning, impedance matching circuitry, and continuous power delivered to ALL transducers at the same time the MSG Series guarentees that you will be using the newest and best technology the industry has to offer. And with 5 different configurations, Modutek has the right generator for every application! |
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Qa Series - Quartz Constant Temperature Bath |
 The Modutek Qa Series of Constant Temperature Baths are the result of almost 20 years of evolutionary bath design and a passion for establishing the quality and performance standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of all our products. |
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QFa Series - High Temperature Recirculating Bath |
 The Modutek QFa Series of High Temperature Recirculating Baths is the result of almost 20 years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our baths. |
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Nb Series - Silicon Nitride Etch Bath |
 The Modutek Nb Series silicon nitride bath is engineered to provide unparalleled process control, safety, and flexibility. This is accomplished by creating a two tiered diagnostic system which monitors the temperature while maintaining the acid to water ratio through D.I. water supplementation. With our new remote metering system the Nb is easier to install and service in new or existing process stations. |
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RCe Series - Temperature Control Recirculator |
 The Modutek RCe Series of Temperature Control Recirculators was engineered to establish the highest standard for chiller/heater units. We have accomplished this by incorporating reliability, cost of ownership, and safety into every aspect of our design. The RCe is composed of a network of components and devices which continuously monitors the system. With a compact design (20.5" x 25" x 15.25") and an all stainless steel/polypropylene fluid path to prevent corrosion which allows the use of DI water, the RCe Series is the unit to buy! |
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Chemfeed Series - Chemical Injection System |
 Why compromise safety and precision during "spiking" operations? The Chemfeed Series Chemical Injection System accurately and safely injects a variety of process chemicals. A Chemfeed System is easy to install in existing or new equipment as well as being simple to operate. Improve the throughput and safety of your stripping process, install a Modutek Chemfeed Chemical Injection System! |
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Neutralizer Series - Wastewater Treatment |
 Neutralizers are a natural extension of our 20+ years of experience with wet process equipment. Modutek now offers a complete line-up of continuous flow and batch neutralization systems. From the conveniently sized 5 gpm unit ideal for Point-of-Use, up to 100 gpm and larger units, two or three stage systems, Modutek has the neutralization system to fit every application! |
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Sysmax was incorporated July 1989 to provide automated wafer process equipment to the semiconductor industry. The Sysmax line of products has processed uniformly consistent, quality products at an economically acceptable cost, in a full production capacity as well as a laboratory R & D tool. The repetitive manual operations required in the wafer process are ideally suited for the Sysmax line of standard products to meet these goals. Sysmax Inc is a manufacturer of automated wafer process and wafer handling equipment for the Semiconductor industry. |
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