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MSI Series - Indirect Megasonic System |
The MSI Series of Indirect Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk and flat panel cleaning, etch and strip applications. In head-to-head tests with other Megasonic brands, Modutek's MSI Series comes out on top. Modutek's MSI Series has the ability to remove tough 0.1µm particles and operate at temperatures up to 160°C.
Applications Click here to view all available models and specifications. |